| Trace metal and ash control | ICP-MS / COA scope by project; GDMS can be aligned where required | Which elements are restricted, what limits are accepted, and is the report batch-specific? | Ash target, restricted-element list, lot COA, or agreed trace-element table. |
| Dimensional metrology | CMM, caliper, optical, flatness, and CTQ feature checks | Which dimensions affect furnace fit, wafer contact, sealing, or post-coating assembly? | First-article report, CTQ dimensional record, or sampling plan. |
| Coating verification | Visual inspection, coating map, thickness target, coupon check, or project-defined method | Which surfaces must be coated, masked, polished, or protected after coating? | Coating map, visual photos, thickness target, and surface acceptance criteria. |
| Clean handling and export packing | Clean handling route, vacuum bagging, separators, foam nests, crates, and labels | Can the part stay clean and undamaged after international transport? | Packing photos, labels, carton/crate method, and shipment document set. |