Trace Impurity Review Table
Semiconductor programs should define restricted elements before sample production. The table helps procurement and process teams turn purity expectations into a measurable qualification file.
| Element | Typical Limit | Why Controlled |
|---|---|---|
| Ta background | Reviewed as coating-material baseline | TaC coating introduces tantalum as the functional barrier; buyers should define how it is reported. |
| Fe / Ni / Cr | Buyer-defined ppm or ppb boundary | Transition metals are common concerns for SiC boule quality and crystal-growth qualification. |
| Al / Ca / Na | Project-specific restricted elements | These elements are often included in high-purity graphite and coating acceptance files. |
| V / Ti | Buyer-defined limits for SiC growth programs | Trace metals can be part of crystal defect, compensation, and contamination review. |





